Leak Test 솔루션
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Compact Light-weight-weighted Portable Type
The weight of the measurement unit is only 2.2kg. it is easy to be carried for vacuum equipments site acceptance test and can measure large size samples by destaching its sample stage and putting it directly on samples.
Specifications
Classification |
content |
Wavelength Range |
530~750nm or 380~760nm |
Spot Size |
φ1mm or φ0.3mm |
Angle of Incidence |
70゜ |
Film Thickness Repeatability |
1σ=0.1nm |
Film Thickness Measurement Range |
1nm~2μm |
Measurment Time |
Sampling: 20ms~3000ms
Analyzing time: 300ms |
Sample Stage |
Manual R-θ stage for φ150mm sample |
Control PC |
Laptop PC including analysis software |
Configuration
Measurement unit (including manual stage), control box、light source unit
control PC (Laptop type) and operation manual (CD).
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Automatic Stage Type with Mapping Function
3 models are available for φ150, 200 and 300mm samples.
Auto mapping R-Θ stage and auto focus function make it possible to measure film thickness of
entire sample surface and dispay film thicknes distribution by color map.
Specifications
Classification |
content |
Model |
1500A |
2000A |
3000A |
Wavelength Range |
530~750nm or 380~760nm |
Spot Size |
φ1mm or φ0.3mm |
Angle of Incidence |
70゜ |
Film Thickness Repeatability |
1σ=0.1nm |
Film Thickness Measurement Range |
1nm~2μm |
Measurment Time |
Sampling: 20ms~3000ms
Analyzing: 300ms |
Sample Stage |
φ150mm |
φ200mm |
φ300mm |
Maximum Automatic Measurable Points |
200 |
200 |
2,000 |
Control PC |
Laptop PC including analysis software |
Configuration
Measurement unit, control unit, control PC (Laptop type) and operation manual (CD).
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Built-in Type for System Integration
Light-weighted and compact design make it possible to be integrated into various kind of equipments. It is suitable for both of vacuum and atmospheric pressure environments.
Specifications
Classification |
content |
Wavelength Range |
530~750nm or 380~760nm |
Spot Size |
φ1mm or φ0.3mm |
Angle of Incidence |
70゜ |
Film Thickness Repeatability |
1σ=0.1nm |
Film Thickness Measurement Range |
1nm~2μm |
Measurment Time |
Sampling: 20ms~3000ms
Analyzing: 300ms |
Installation Environment |
Atmosphere or vacuum |
Configuration
Measurement unit, control box, light source unit, operation manual (CD),
analysis software (CD).
For large size substrate
In addition to these standard models, the model for large size substrate (G6) is available. Please contact us for more information.