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Ellipsometer

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  • Compact Light-weighted Portable Type

    The Weight of the measurement unit is only 2.2kg. It is easy to be carried for vacuum equipments site acceptance test and can measure large size samples by detaching its sample stage and putting it directly on samples.

    Specifications

     
    Classification content
    Wavelength Range 530~750nm or 380~760nm
    Spot Size φ1mm or φ0.3mm
    Angle of Incidence 70゜
    Film Thickness Repeatability 1σ=0.1nm
    Film Thickness Measurement Range 1nm~2μm
    Measurment Time Sampling: 20ms~3000ms
    Analyzing time: 300ms
    Sample Stage Fixed Stage (<φ150mm, detachable)
    Control PC Laptop PC including analysis software


    Configuration

    Measurement unit (including fixed stage), control box、light source unit
    control PC (Laptop type) and operation manual (CD).


    Manual Stage Type for φ150mm Samples

    It is easy to locate measurement points by the easy-to-use manual R-θ stage.

    Specifications

     
    Classification content
    Wavelength Range 530~750nm or 380~760nm
    Spot Size φ1mm or φ0.3mm
    Angle of Incidence 70゜
    Film Thickness Repeatability 1σ=0.1nm
    Film Thickness Measurement Range 1nm~2μm
    Measurment Time Sampling: 20ms~3000ms
    Analyzing time: 300ms
    Sample Stage Manual R-θ stage for φ150mm sample
    Control PC Laptop PC including analysis software


    Configuration

    Measurement unit (including manual stage), control box、light source unit
    control PC (Laptop type) and operation manual (CD).
  • Automatic Stage Type with Mapping Function

    3 models are available for φ150, 200 and 300mm samples.
    Auto mapping R-Θ stage and auto focus function make it possible to measure film thickness of
    entire sample surface and dispay film thicknes distribution by color map.

    Specifications

     
    Classification content
    Model 1500A 2000A 3000A
    Wavelength Range 530~750nm or 380~760nm
    Spot Size φ1mm or φ0.3mm
    Angle of Incidence 70゜
    Film Thickness Repeatability 1σ=0.1nm
    Film Thickness Measurement Range 1nm~2μm
    Measurment Time Sampling: 20ms~3000ms
    Analyzing: 300ms
    Sample Stage φ150mm φ200mm φ300mm
    Maximum Automatic Measurable Points 200 200 2,000
    Control PC Laptop PC including analysis software


    Configuration

    Measurement unit, control unit, control PC (Laptop type) and operation manual (CD).
  • Built-in Type for System Integration

    Light-weighted and compact design make it possible to be integrated into various kind of equipments. It is suitable for both of vacuum and atmospheric pressure environments.

    Specifications

     
    Classification content
    Wavelength Range 530~750nm or 380~760nm
    Spot Size φ1mm or φ0.3mm
    Angle of Incidence 70゜
    Film Thickness Repeatability 1σ=0.1nm
    Film Thickness Measurement Range 1nm~2μm
    Measurment Time Sampling: 20ms~3000ms
    Analyzing: 300ms
    Installation Environment Atmosphere or vacuum


    Configuration

    Measurement unit, control box, light source unit, operation manual (CD),
    analysis software (CD).

    For large size substrate

    In addition to these standard models, the model for large size substrate (G6) is available. Please contact us for more information.
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