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Leak Test 솔루션
Leak Test 솔루션
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Compact Light-weighted Portable Type
The Weight of the measurement unit is only 2.2kg. It is easy to be carried for vacuum equipments site acceptance test and can measure large size samples by detaching its sample stage and putting it directly on samples.
Specifications
Classification content Wavelength Range 530~750nm or 380~760nm Spot Size φ1mm or φ0.3mm Angle of Incidence 70゜ Film Thickness Repeatability 1σ＝0.1nm Film Thickness Measurement Range 1nm~2μm Measurment Time Sampling: 20ms~3000ms
Analyzing time: 300msSample Stage Fixed Stage (<φ150mm, detachable) Control PC Laptop PC including analysis software
Configuration
Measurement unit (including fixed stage), control box、light source unit
control PC (Laptop type) and operation manual (CD).
Manual Stage Type for φ150mm Samples
It is easy to locate measurement points by the easy-to-use manual R-θ stage.
Specifications
Classification content Wavelength Range 530~750nm or 380~760nm Spot Size φ1mm or φ0.3mm Angle of Incidence 70゜ Film Thickness Repeatability 1σ＝0.1nm Film Thickness Measurement Range 1nm~2μm Measurment Time Sampling: 20ms~3000ms
Analyzing time: 300msSample Stage Manual R-θ stage for φ150mm sample Control PC Laptop PC including analysis software
Configuration
Measurement unit (including manual stage), control box、light source unit
control PC (Laptop type) and operation manual (CD). -
Automatic Stage Type with Mapping Function
3 models are available for φ150, 200 and 300mm samples.
Auto mapping R-Θ stage and auto focus function make it possible to measure film thickness of
entire sample surface and dispay film thicknes distribution by color map.
Specifications
Classification content Model 1500A 2000A 3000A Wavelength Range 530~750nm or 380~760nm Spot Size φ1mm or φ0.3mm Angle of Incidence 70゜ Film Thickness Repeatability 1σ＝0.1nm Film Thickness Measurement Range 1nm~2μm Measurment Time Sampling: 20ms~3000ms
Analyzing: 300msSample Stage φ150mm φ200mm φ300mm Maximum Automatic Measurable Points 200 200 2,000 Control PC Laptop PC including analysis software
Configuration
Measurement unit, control unit, control PC (Laptop type) and operation manual (CD). -
Built-in Type for System Integration
Light-weighted and compact design make it possible to be integrated into various kind of equipments. It is suitable for both of vacuum and atmospheric pressure environments.
Specifications
Classification content Wavelength Range 530~750nm or 380~760nm Spot Size φ1mm or φ0.3mm Angle of Incidence 70゜ Film Thickness Repeatability 1σ＝0.1nm Film Thickness Measurement Range 1nm~2μm Measurment Time Sampling: 20ms~3000ms
Analyzing: 300msInstallation Environment Atmosphere or vacuum
Configuration
Measurement unit, control box, light source unit, operation manual (CD),
analysis software (CD).
For large size substrate
In addition to these standard models, the model for large size substrate (G6) is available. Please contact us for more information.
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