대면적 글라스 및 필름 스테이지용 면저항측정기
Measuring method | 4-Point Probe |
---|---|
Configuration | Sngle or dual |
Measuring Range | 1mΩ/sq. ~ 1GΩ/sq. , 10.0 μΩ·㎝ ~ 10.0 MΩ·㎝ |
Measurement accuracy | ±0.5% (KRISS Standard wafer, when 23℃) |
Measuring time | range search max. 3s / search after actual 1-2s |
4-Point Probe pin spacing | 1.00㎜ |
Pin load | 80~160g/pin |
Pin radius | 300㎛ |
Tolerance | ±0.01㎜ |
Pin material | tngsten |