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반도체 검사장비

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견적문의
Wafer size ø200mm~300mm
Microscope (micro) inspection  
Total magnification 25x to 1,500x
Inspection modes Brightfield, darkfield, 3D Laser Scanning (Option)
Autofocus Laser AF or Illumination slit projection
Macro inspection Surface Macro, backside Macro Halogen Spotlight illumination
Macro inspection illumination Halogen Spotlight & UV 형광 illumination illumination
Load port 1 FOUP (or 1 FOSB: option)
Position selectable from front, side or rear
Wafer transfer Robotic handling; vacuum chuck;
noncontact pre-alignment mechanism
WAFER ALIGNMENT Non-contact Centering
Operation Touch panel GUI, mouse, keyboard
UPH 50-60WPH
Power 220VAC, 50/60HZ, 10A
Compressed Air 4.5kgf/cm2 dry air, 50 litre / minute
Laser 3D Microscope Magnification : -108x-17,280x
Height, Width, Roughness Measurment  
Pattern Auto Capture  
Auto Review inspection System Auto Stage moving ( Recipe Mode)
  Pattern Auto Capture  
  Auto Measurment  
IR inspection System 웨이퍼 레벨 CSP의 비파괴 검사
융합 or구리 배선의 부식에 의한 누출과 수지의 peeling검사  
WAFER ID READER OCR: IBM font, Triple font, SEMI font
(SEMI M12, M13 & M1.15)
2D Data Matrix ( ECC200, 8x32 ): SEMI T7, M1.15  
Barcode : IBM412 & BC412 (SEMI T1-95)  
ULPA boronless FFU (fan filter unit) Option
HOST INTERFACE OR SECS-GEM CAPABILITY Option
Wafer size Magnification : -108x-17,280x
Height, Width, Roughness Measurment  
Pattern Auto Capture  
Wafer cassette Auto Stage moving ( Recipe Mode)
IR inspection System 웨이퍼 레벨 CSP의 비파괴 검사
융합 or구리 배선의 부식에 의한 누출과 수지의 peeling검사  
Wafer ID Reader OCR: IBM font, Triple font, SEMI font
(SEMI M12, M13 & M1.15)
2D Data Matrix ( ECC200, 8x32 ): SEMI T7, M1.15  
Barcode : IBM412 & BC412 (SEMI T1-95)  
ULPA boronless FFU (fan filter unit) Option
HOST INTERFACE OR SECS-GEM CAPABILITY Option
UPH 400 wafers
1750 x 1750 x 2000 mm  
Power 220VAC, 50/60HZ, 10A
4.5kgf/cm2 dry air, 50 litre / minute  
Approximately 800kg   
맨 위로
주소 : 경기도 하남시 조정대로 150 아이테코 오렌지존 4층 470호 상호 : (주)에이아이엠 | Tel : 031-745-2800 ㅣ Fax : 031-790-4055 대표자 : 나용주 | 사업자등록번호 : 739-81-00015
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