Display
Display Measurement and Inspection Equipment
Measurement
Large Area Thin Film Thickness Measurement Equipment
Total Measurement Equipment System For thin-film solar cells, OLEDs, LCDs, coated glass
| Model : AS-TEO, AS-TRC | Beam Diameter | 120㎛ * 300㎛ | ||
|---|---|---|---|---|
| Spectral Range | 245m to 1000m (Option:~ 1700nm) | |||
| UV Spectrometer | 1.6nm pixel resolution, ~5nm | |||
| NIR Spectrometer | 3.2m pixel resolution, ~10m bandwidth (NIR) | |||
| 옵션 | SPC 및 MES 연동하여 내부 공정 및 계측기와 연동 가능 | |||
| Fast Camera Sample Alignment | ||||
■ SPECIFICATIONS
SE+SR Auto scanning module
• Spectral Range : 350-1000
• Acquisition speed : < 1 -5 sec/point
• Metrology Performance
– Film thickness
– Refractive index (n) and extinction coefficient (k)
– Uniformit
3D Microscope
• Magnification : 108X – 17 f280x
• Light Source : 405nm Laser
• Repeatability : Xr Y : 0.12um / Z : 10nm
• Step height measurement (3D)
• Roughness measurement
• Auto & Manual Mode
• Report (Excel)
• Repeatability : ‡ 0.3% of reading
• Uniformity
• W.L. range: 350nm-1100nm (option :900nm – 1600 nm)
• W.L. Resolution: 5 nm
• Transmission & Reflection
Measurement
디스플레이-대면적XRF
Invar Film Auto Optical Inspection System
SPECIFICATION
| 대면적XRF | 측정 대상 | • Fe, Ni 등의 함량(조성비) • INVAR Foil 등의 두께 | ||
|---|---|---|---|---|
| Intended use | Energy dispersive X-ray measuring instrument (EDXRF) to determine thin | |||
| Element range | Aluminum (13) to Uranium U (92) – up to 24 ements simultaneously | |||
X-ray tube | Larger Window, 70mm2, high flux SDD with 135eV resolution | |||
High voltage | ~ 0.5 mm (0.02inch) | |||
X-ray detector | 매크로 – 45x (5x digital zoom) | |||
방식 | 마이크로 – 150x | |||
구동기구 | SPC 및 MES 연동하여 내부 공정 및 계측기와 연동 가능 | |||
정도 | Wafer, Display, Thin Film, Bump, RoHs, 중금속분석, 성분분석, 불순물함량분석, 식품 미량 원소 분석, 치과용 재료분석, 배터리 전극 재료 분석 etc. | |||
이동속도 | 최대 500mm/sec. | |||
조작 | PC제어 Program이동 | |||
로딩 / 언로딩 | •작업자 매뉴얼 로딩/언로딩 •로딩 후 스테이지 안착후 버큠(Aerofix) 흡착 | |||
Measurement
Display-Invar Inspectors
■Invar Film Auto Optical Inspection System
■Model : ASI-350
• Inspection target: Invar Film
• Inspection Item – AOI : Appearance inspection and review of scratch foreign matter, pattern, etc
– Microscope: Review and Pattern Size Measurements
• Inspection method: Full auto system
• Inspection speed: 30 mm/s
• Exploration of Line Scan Auto Focus function
| Model: ASI-350 | Inspection target | Invar Film | ||
|---|---|---|---|---|
| Inspection items | •AOI: Appearance inspection and review of scratches, foreign substances, patterns, etc. •MICROSCOPE: Review and pattern size measurement |
|||
| Inspection method | Full auto system | |||
| Inspection speed | 30m/s | |||
| Line Scan Auto Focus function equipped | ||||
■Invar Inspectors Video
– (Fe+ NI) Automatic inspection after scanning with Film Line Scan Camera (AOI)
– Map display by defect item (quickly check which areas are defective)
– Verifying defective location X.Y coordinates
– Go to the XY coordinates obtained with the AOI camera and check the presence or absence of defects at high magnification
– AF of pattern (CD) size to measure upper and lower high magnification CD
Measurement
Display-Film Inspection Machine
This facility is a 2D vision inspection device that detects poor appearance of mobile liquid crystal films.
A multi-image combination of high-brightness LED autonomous lighting (OEM special optical system) takes one sample eight times,
It generates reflectance, roughness, slope data, etc. using its own image processing algorithm using the photographed image..
A.I Vision System (including Rule Vision) is a system that inspects and classifies defects in appearance through algorithms.
| 필름검사기 | 장비 SIZE | 1,600 x 1,800(mm) | ||
|---|---|---|---|---|
| 전원 | AC 220V, 3P | |||
| 구동기기 | Servo Motor, Cylinder 외 | |||
| HMI | 7”Profacex2EA(장비전,후배치) | |||
| 검사 Control | 산업용 컴퓨터 | |||
| H/W Control | PLC System | |||
| Emergency | EMO Switch x 3 EA | |||
| Cleaness | Class 1000 (FFU 적용) | |||
Bad Type Shot Image
• If there is no depth of S/C quantity, quantity can be classified by RG2 image
• Raw material bubbles: NH-processed and INV-processed images can be distinguished
• Line pressed: INH, INV image distinguishable
• Spot: RG2 image can be distinguished as defective
• Raw material foreign matter: Can be classified into INH and INV images
• Photo taken: INH-Processed, INV-Processed image
(Examination screen)
(Film Load)
(Film Unload)
Measurement
Display to Surface Resistance Measurement
■ Surface resistance, non-resistance measurement
■ Model : AF – 128
• Measure resistance, sheet resistance, non-resistance, conductivity
• Save measurement data (date, sample model, custom selection)
• Repeated measurement for each sample after saving custom points
• Vision Aligner Camera
• Mapping (Display : 1100x1300mm)
• Measurement range 1mΩ/sq. ~ 1GΩ/sq., 10.0 μΩ·cm to 10.0 MΩ·cm
• 2D, 3D Graphic viewer.
• Option: SPC and MES can be linked with internal processes and instruments
| Model: AF-128 | Resistance, sheet resistance, resistivity, conductivity measurement | |||
|---|---|---|---|---|
| Save measurement data (select date, sample model, customization) | ||||
| Repeated measurement function for each sample after saving user-specified points | ||||
| Vision | Aligner Camera | |||
| Mapping | Display : 1100x1300mm | |||
| Measurement range | 1mΩ/sq. ~1GΩ/sq. , 10.0 μΩ·cm ~ 10.0 MΩ·cm | |||
| 2D, 3D Graphic viewer. | ||||
| Options | Can be linked to internal processes and instruments by linking SPC and MES | |||
